Semiconductor Measurement in Malaysia: Critical Moisture, Cleanroom & Process Measurement

Critical Moisture, Cleanroom and Process Measurement

Semiconductor measurement reaches beyond room humidity. Dry-gas supplies, equipment enclosures, temperature-sensitive surfaces and cooling utilities each require measurements suited to their operating conditions and the decisions engineers need to make.

Seacom helps customers in Malaysia select instruments for three connected areas: critical moisture measurement, cleanroom conditions and process measurement. We review the measurement location, required range, installation and system interface before recommending a configuration.

• Critical moisture: dew point measurement in suitable dry nitrogen, clean dry air and purge-gas applications.
• Cleanroom and equipment conditions: humidity and temperature measurement at the room, enclosure or point of use, with records and alarms where required.
• Process and utility measurement: equipment-surface temperature checks, cooling-water flow measurement and controlled gas delivery.

The examples below cover instruments from Vaisala, Anritsu, Badger Meter and KOFLOC. Each addresses a different measurement task; selection depends on the actual gas, liquid, surface and operating conditions.

1. Monitoring Dry Gas Used for Chip and Wafer Drying

Dry nitrogen and clean dry air are commonly used where moisture must be controlled around semiconductor equipment, drying processes and sensitive components.

A dew point measurement provides information about the moisture content of the gas supplied to the equipment.

For example, an equipment engineer may need to monitor the nitrogen supply serving a drying enclosure, purge line or process tool. The measurement can be made directly in a suitable line or through an appropriately designed sampling arrangement.

Vaisala DMT153 for Ultra-Dry Gas

The Vaisala DMT153 Dew Point Transmitter is designed for demanding low-dew-point measurement in applications including semiconductor production, pure gases, dry enclosures and OEM equipment.

Its calibrated dew/frost-point range extends down to −80 °C Td/f, making it suitable where very low moisture levels need to be monitored continuously.

• Ultra-dry process and purge gases
• Nitrogen and compatible clean gases
• Glove boxes and dry enclosures
• OEM semiconductor equipment
• Critical low-moisture gas distribution

A dew point measurement describes the gas conditions at the sensor. It does not directly measure residual moisture in a wafer or semiconductor component. Process completion should therefore be established using the validated manufacturing method.

View Vaisala DMT153

Vaisala DMP7 for Compact Installations

Where installation space is limited, the Vaisala DMP7 Compact Dew Point Probe provides another option for low-humidity measurement.

Its short probe arrangement makes it useful for equipment, dry-air systems and restricted installations where a conventional transmitter would be difficult to accommodate.

Before selecting a dew point instrument, confirm:

• Gas composition
• Required dew point range
• Operating pressure
• Gas temperature
• Measurement location
• Direct insertion or sampling arrangement
• Required analog or digital output

View Vaisala DMP7

2. Humidity and Temperature Around Semiconductor Equipment

Cleanroom humidity and the conditions inside production equipment are not necessarily identical.

Local heating, airflow, enclosure design and process operation can create different conditions around individual tools even when the surrounding cleanroom remains stable.

For this reason, define clearly whether the measurement is intended to represent:

• The surrounding cleanroom
• An equipment enclosure
• An air inlet
• An exhaust or return-air path
• A process chamber
• A local environmental-control system

Vaisala HMP110 for Equipment Integration

The Vaisala HMP110 High-Accuracy Humidity and Temperature Probe is a compact probe suitable for demanding equipment-integration and controlled-environment applications.

It can be considered where humidity and temperature need to be measured inside equipment, environmental chambers, enclosures or other locations where a compact probe is preferred.

• 0–100% RH measurement
• High-accuracy humidity measurement
• Compact stainless-steel probe construction
• Analog or Modbus RTU output options
• Suitable for integration into third-party equipment

Where solvents or other chemical vapours may be present, suitability should be assessed according to the actual exposure rather than the humidity range alone.

View Vaisala HMP110

Vaisala Indigo Transmitters for Smart-Probe Integration

For applications requiring local indication, outputs, relays or network integration, compatible Vaisala smart probes can be connected to an Indigo transmitter.

The Vaisala Indigo510 and Indigo520 provide transmitter platforms for demanding industrial installations.

The probe and Indigo transmitter should be selected together according to the required measurement, outputs, display, communication and installation arrangement.

View Vaisala Indigo510 and Indigo520

3. Checking Equipment-Surface and Wafer Temperature

Temperature measurement in semiconductor equipment requires a clear definition of the target.

The temperature of a heater surface, wafer support and wafer itself may be different. A measurement taken from one should not automatically be treated as the temperature of another.

Anritsu AX Series for Stationary Surface Measurement

The Anritsu AX Series Surface Temperature Probes are designed for contact measurement of stationary surfaces.

Their flexible contact-support head helps maintain contact between the sensing element and the target surface.

Typical uses can include authorised maintenance and setup measurements on accessible:

• Heater surfaces
• Hotplates
• Equipment panels
• Support surfaces
• Process-tool components

The exact probe should be selected according to the target temperature, available contact area, surface geometry and access.

View Anritsu AX Series Surface Probes

Use a Compatible Anritsu Thermometer

The surface probe must be matched with a suitable thermometer and thermocouple type.

The Anritsu HR Series High-Accuracy Handheld Thermometers can be considered for compatible Anritsu probe configurations.

Confirm the thermocouple type, connector, measuring range and required instrument configuration before ordering.

View Anritsu HR Series Thermometers

Direct Wafer Temperature Requires a Different Approach

A conventional contact probe should not automatically be described as a dedicated wafer-temperature sensor.

Direct contact with a production wafer introduces additional considerations including:

• Surface damage
• Contamination
• Contact force
• Sensor mass
• Measurement disturbance
• Position of the sensing junction

Where the requirement is to profile the temperature experienced by a wafer inside equipment, an instrumented wafer or other specialised arrangement may be more appropriate.

Send Seacom the application, equipment layout and required temperature range so that the measurement method can be reviewed before a probe is selected.

4. Measuring Cooling and Utility Water

Semiconductor plants use water for many different purposes, including equipment cooling and general plant utilities.

Cooling water, demineralised water, ultrapure water and chemical solutions should not be treated as the same flow-meter application.

Badger Meter ModMAG M2000

For compatible conductive cooling and utility water, the Badger Meter ModMAG M2000 Electromagnetic Flow Meter can provide continuous flow measurement and integration with plant monitoring systems.

The M2000 is available with integral or remote transmitter arrangements and communication options including Modbus and BACnet depending on configuration.

When selecting an electromagnetic flow meter, confirm:

• Minimum, normal and maximum flow
• Pipe size
• Water conductivity
• Water chemistry
• Wetted-material compatibility
• Pipe and flange standard
• Available straight pipe
• Full-pipe conditions
• Grounding requirements
• Required communication interface

The M2000 requires a conductive liquid. Do not assume that every ultrapure-water application is suitable for a magnetic flow meter without checking the actual conductivity against the instrument requirements.

View Badger Meter ModMAG M2000

5. Measuring and Controlling Nitrogen Purge Flow

Dew point and flow answer different process questions.

A dew point instrument indicates how dry the gas is, while a flow meter or mass flow controller indicates how much gas is moving through the system.

A nitrogen-purge application may therefore require both measurements.

KOFLOC Mass Flow Meters and Controllers

For semiconductor equipment requiring controlled gas flow, Seacom supplies KOFLOC precision mass flow meters and mass flow controllers .

Typical applications can include nitrogen purge, equipment gas supply, test systems and compatible process-gas control.

Selection should consider:

• Gas type
• Minimum and maximum flow
• Inlet pressure
• Outlet pressure
• Pressure differential
• Connection size and type
• Cleanliness requirements
• Analog or digital control interface
• Normally open or normally closed control requirement where applicable

A mass flow controller selected for nitrogen should not automatically be used for another gas without checking calibration, materials and application compatibility.

Explore KOFLOC Mass Flow Meters & Controllers

6. Continuous Environmental Monitoring

Some semiconductor facilities require more than individual transmitter signals.

Where several locations need central records, alarms, trends and reports, a continuous monitoring system can provide an independent layer of environmental monitoring.

The Vaisala viewLinc Continuous Monitoring System can monitor compatible instruments across multiple locations.

Depending on the system design, monitored parameters can include:

• Temperature
• Relative humidity
• Dew point
• Differential pressure
• Other compatible environmental measurements

Continuous monitoring should be distinguished from process control. The system architecture should define clearly which device controls the process and which system provides independent records and alarms.

View Vaisala viewLinc Continuous Monitoring System

Start with the Measurement Point

The most useful instrument enquiry describes where the measurement will be made and what decision depends on the result.

A drawing, process sketch or photograph can often explain the application more clearly than a model number alone.

Measurement Support Beyond These Examples

Semiconductor measurement requirements are not limited to the examples above.

Seacom supports a wider range of industrial measurement applications including:

• Humidity measurement — probes and transmitters for equipment, rooms, ducts and controlled environments
• Dew point measurement — dry gases, compressed air, drying processes and ultra-low humidity
• Temperature measurement — surface, air, liquid and process temperature
• Flow measurement — compatible liquids and gases
• Continuous monitoring systems — central records, alarms, trends and reporting

Discuss Your Semiconductor Measurement Requirements

Contact Seacom for help selecting instruments for critical moisture, cleanroom conditions, equipment temperature, cooling-water flow or purge-gas control.

Send us the measurement location, gas or liquid, required range, operating temperature and pressure, and preferred output. For equipment applications, include any restrictions on materials, cleanliness, probe contact and installation space. An existing model number, photograph or process sketch can help us review the options.

Send us an enquiry by email or discuss your application on WhatsApp.