Choosing Instruments for Semiconductor Equipment and Facilities

Seacom supports humidity, dew point, temperature, gas and liquid flow measurement, together with continuous monitoring systems for industrial facilities and equipment. Our applications include semiconductor manufacturing, pharmaceutical facilities, data centres, utilities and general production.

Whether you need a portable instrument for maintenance, a transmitter connected to your control system or continuous monitoring across several locations, we start by understanding the measurement and operating conditions.

The semiconductor examples below show how Vaisala, Anritsu, Badger Meter and KOFLOC instruments can be considered for particular tasks. They illustrate part of our offering; you are welcome to contact Seacom about other measurement applications.

1. Monitoring Dry Gas Used for Chip and Wafer Drying

Where a drying or purging step uses dry nitrogen or clean dry air, one useful measurement is the moisture content of the gas supplied to the equipment. A dew point transmitter can help establish whether that gas meets the process requirement.

Example: An equipment engineer wants to monitor the nitrogen supply serving a drying enclosure. The measurement can be taken at a suitable supply-line or sampling point, selected with the equipment designer.

Product to Consider: Vaisala DMT153

The Vaisala DMT153 is designed for low dew point measurement in applications including semiconductor manufacturing and pure-gas systems. Its specified dew/frost-point measurement range is −80 to −20 °C.

It is a candidate where the required gas-dryness range falls within those specifications. For an installation with limited space, the Vaisala DMP7 compact probe is another option to review against the required range and operating conditions.

This measurement describes the gas at the sensor. It does not directly measure residual moisture inside a chip or certify that a wafer is completely dry. A drying endpoint must be established through the validated process and a suitable measurement arrangement.

• Specify the gas composition and any chemical vapours.
• State the required dew point and measurement pressure.
• Identify whether the sample is supply gas, chamber gas or exhaust.
• Check sample tubing, leakage and response-time requirements.

View Vaisala DMT153 →
View Vaisala DMP7 →

2. Measuring Humidity Around Semiconductor Equipment

Room humidity and the conditions inside an equipment enclosure are not necessarily the same. Local heating, airflow and the equipment arrangement can make the measurement location important.

Example: A machine builder needs humidity and temperature readings inside an enclosure, while the facility monitoring system measures the surrounding cleanroom. Both readings can be useful, but they represent different locations.

Products to Consider: Vaisala Humidity Probes and Indigo Transmitters

Vaisala lists the compact HMP110 humidity and temperature probe among its semiconductor-related products. For installations requiring a separate transmitter and display, an Indigo520 with a compatible humidity probe is another configuration to investigate.

Select the probe for its actual exposure conditions. Where solvents or other chemicals are present, confirm suitability with the manufacturer rather than relying on the humidity range alone.

Explore Vaisala humidity measurement options →
View Vaisala Indigo510 and Indigo520 →

3. Checking Equipment-Surface and Wafer Temperature

Before choosing a temperature probe, establish what temperature is required: the heater surface, the wafer support, or the wafer itself. A reading from one location should not automatically be treated as the temperature of another.

Equipment-Surface Checks: Anritsu AX Series

The Anritsu AX series comprises stationary-surface temperature probes with a contact-support mechanism. This helps maintain contact between the sensing element and the surface being measured.

Example: During an authorised maintenance or setup check, an engineer needs to measure an accessible, stationary equipment surface, such as a suitable hotplate or support surface. An AX probe is a candidate after checking temperature, surface geometry and whether probe contact is permitted.

Pair the probe with a compatible Anritsu thermometer, such as an appropriate HR-series model. Confirm the thermocouple type, connector and measuring range for the selected combination.

Direct Wafer-Temperature Profiling

The AX should not be described as a dedicated wafer-temperature probe without an application review. Direct contact with a production wafer requires consideration of surface damage, contamination, contact force and measurement disturbance.

Anritsu also lists an AW series silicon wafer with thermocouples. This is a more relevant product family to investigate when the requirement is an instrumented wafer for temperature evaluation. Confirm the required configuration, equipment compatibility and availability separately.

Explore Anritsu temperature instruments →
View Anritsu HR-series thermometers →

4. Measuring Cooling and Utility Water with Badger Meter

Water measurement in a semiconductor facility can involve cooling water, utility water, ultrapure water or chemical solutions. These services must be assessed separately.

Example: A facilities engineer needs a flow reading from a conductive cooling-water branch serving production equipment. The reading will be connected to the plant monitoring system.

Product to Consider: Badger Meter ModMAG M2000

The Badger M2000 electromagnetic flowmeter can be considered for compatible, conductive water services. It offers integral or remote transmitter arrangements and communication options including BACnet and Modbus. The required interface must be specified when selecting the unit.

Badger specifies a minimum conductivity of 5 µS/cm, or 20 µS/cm for demineralised water. Therefore, do not select the M2000 for an ultrapure-water loop without checking conductivity; water below the specified limit is outside its stated suitability.

• Confirm water chemistry and wetted-material compatibility.
• Provide minimum, normal and maximum flow.
• Check pipe size, flange rating and installation space.
• Confirm full-pipe conditions and grounding requirements.
• Specify the power supply and monitoring-system interface.

Explore electromagnetic flowmeters →
Discuss other water-flow measurement options →

5. Controlling Nitrogen Purge Flow

Dew point and flow answer different questions. Dew point indicates gas dryness; a flow measurement indicates how much gas is being supplied. A purge application may need both.

Example: A wafer-handling system requires controlled nitrogen flow into a load port or stocker. KOFLOC identifies this type of purge-gas application for its 3660 series mass flow controllers.

A mass flow controller measures and regulates flow. Selection should account for the gas, required range, pressure differential, connections, cleanliness requirements and control interface. A model selected for nitrogen purging should not automatically be used for reactive process gases.

Explore KOFLOC mass flow meters and controllers →

Start with the Measurement Point

The most useful enquiry tells us where the measurement will be made and what decision depends on it. A drawing or photograph often helps explain details that are difficult to capture in a model number alone.

• Drying or purge gas: Gas composition, target dew point, pressure and sampling location.
• Humidity: Measurement location, expected range and chemical exposure.
• Temperature: Surface or wafer, temperature range, access and contact restrictions.
• Water flow: Water type, conductivity, flow range and pipe details.
• Gas flow control: Gas, flow range, inlet and outlet pressure, and cleanliness requirements.

Measurement and Monitoring Support from Seacom

Your requirement does not have to match the examples above. Seacom can help review instruments and monitoring options for new projects, equipment upgrades, replacement units and day-to-day measurement needs.

• Humidity measurement — portable instruments, probes and transmitters.
• Dew point measurement — compressed air, dry gases and drying applications.
• Temperature measurement — surface, air and liquid measurement.
• Flow measurement and control — instruments for compatible gases and liquids.
• Continuous monitoring systems — discuss the locations, parameters, records and alarm functions your facility needs.

Tell Us What You Need to Measure

Send us your application, existing model number or project specification. A photograph or process sketch is also useful. Include the measuring range, operating conditions, quantity and required output where available.

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